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Hardware & Compute 10 September 2026 from the archive

ASML Adapts High-NA EUV Lithography for Next-Gen Nvidia AI Chips

Dutch lithography giant ASML is collaborating with major chipmakers to adapt its next-generation High-NA EUV tools for the massive data-center processors designed by Nvidia and other tech firms. The initiative addresses a key limitation of ASML's TWINSCAN EXE:5000 systems, which feature an exposure field half the size of conventional EUV machines. This smaller field poses manufacturing challenges for the increasingly large silicon dies required by advanced AI hardware. The urgency of this adaptation is highlighted by the soaring silicon demands of modern AI architectures. According to ASML, Nvidia's 2024 Blackwell system requires 2.5 wafers, whereas the projected 2027 Rubin Ultra system…

Key points

  • ASML is adapting High-NA EUV tools to overcome a half-size exposure field limitation for large AI processors.
  • Nvidia's upcoming 2027 Rubin Ultra system is projected to require 10 wafers, up from 2.5 for Blackwell.
  • Intel has initiated high-volume manufacturing for selected Intel 18A layers using ASML's High-NA EUV systems.

Sources

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